STI Smiling

NanoSeeX is the first company in the world to measure smiling CDs with excellent accuracy (≤ 1 nm), precision (≤ 0.1 nm), and linearity (R2 > 0.9, Slope within 1 ± 0.1) using high-order mode X-ray signals, which have higher sensitivity to smiling CD compared to the current mainstream Optical Critical Dimension (OCD) measurement method and exhibit low correlation between the individual smiling CD and the metal alloy CD.